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Results: 1
Atomic-layer chemical-vapor-deposition of TiN thin films on Si(100) and Si(111)
Authors:
Kim, YS Jeon, H Do Kim, Y Kim, WM
Citation:
Ys. Kim et al., Atomic-layer chemical-vapor-deposition of TiN thin films on Si(100) and Si(111), J KOR PHYS, 37(6), 2000, pp. 1045-1050
Risultati:
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