Authors:
Dombrowski, KF
Dietrich, B
De Wolf, I
Rooyackers, R
Badenes, G
Citation: Kf. Dombrowski et al., Investigation of stress in shallow trench isolation using UV micro-Raman spectroscopy, MICROEL REL, 41(4), 2001, pp. 511-515
Citation: B. Dietrich et Kf. Dombrowski, Experimental challenges of stress measurements with resonant micro-Raman spectroscopy, J RAMAN SP, 30(10), 1999, pp. 893-897
Authors:
Bhagavannarayana, G
Dietrich, B
Zaumseil, P
Dombrowski, KF
Citation: G. Bhagavannarayana et al., Determination of germanium content and relaxation in Si1-xGex/Si layers byRaman spectroscopy and X-ray diffractometry, PHYS ST S-A, 172(2), 1999, pp. 425-432