Authors:
Park, SW
Kim, DJ
Dong, CD
Kwak, NY
Kong, YT
Lee, CH
Lee, SC
Park, SH
Citation: Sw. Park et al., Effect of annealing ambient on WSix(x=2.3) sidewall deformation and contact resistance in dichlorosilane-based W-polycide gate, J VAC SCI B, 19(4), 2001, pp. 1186-1194
Authors:
Park, SW
Kim, DJ
Dong, CD
Kwak, NY
Kong, YT
Lee, CH
Lee, SC
Park, SH
Kim, JW
Yang, HS
Citation: Sw. Park et al., Improvement on the reliability of flash EEPROM by annealing after self-aligned source dry etching, J ELCHEM SO, 148(5), 2001, pp. G291-G296
Citation: Cd. Dong et al., A study on surfactant adsorption kinetics: Effect of bulk concentration onthe limiting adsorption rate constant, LANGMUIR, 16(10), 2000, pp. 4573-4580