Authors:
Drusedau, TP
Koppenhagen, K
Blasing, J
John, TM
Citation: Tp. Drusedau et al., Texturing effects in molybdenum and aluminum nitride films correlated to energetic bombardment during sputter deposition, APPL PHYS A, 72(5), 2001, pp. 541-550
Authors:
Drusedau, TP
Lohmann, M
Klabunde, F
John, TM
Citation: Tp. Drusedau et al., Investigations on energy fluxes in magnetron sputter-deposition: implications for texturing and nanoporosity of metals, SURF COAT, 133, 2000, pp. 126-130
Citation: Tp. Drusedau et J. Blasing, Optical and structural properties of highly c-axis oriented aluminum nitride prepared by sputter-deposition in pure nitrogen, THIN SOL FI, 377, 2000, pp. 27-31
Authors:
Drusedau, TP
Bock, T
John, TM
Klabunde, F
Eckstein, W
Citation: Tp. Drusedau et al., Energy transfer into the growing film during sputter deposition: An investigation by calorimetric measurements and Monte Carlo simulations, J VAC SCI A, 17(5), 1999, pp. 2896-2905
Citation: Tp. Drusedau et al., Deposition of nanocrystalline silicon mediated by ultrathin aluminum underlayers by PCVD and sputter-deposition at 500 K, THIN SOL FI, 337(1-2), 1999, pp. 41-44