Authors: Schenk, H Durr, P Kunze, D Lakner, H Kuck, H

Citation: H. Schenk et al., A resonantly excited 2D-micro-scanning-mirror with large deflection, SENS ACTU-A, 89(1-2), 2001, pp. 104-111

Authors: Ljungblad, U Dauderstadt, U Durr, P Sandstrom, T Buhre, H Lakner, H

Citation: U. Ljungblad et al., New laser pattern generator for DUV using a spatial light modulator, MICROEL ENG, 57-8, 2001, pp. 23-29

Authors: Schenk, H Durr, P Haase, T Kunze, D Sobe, U Lakner, H Kuck, H

Citation: H. Schenk et al., Large deflection micromechanical scanning mirrors for linear scans and pattern generation, IEEE S T QU, 6(5), 2000, pp. 715-722

Authors: Durr, P

Citation: P. Durr, P.E basics, MECH ENG, 122(7), 2000, pp. 6-6