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Results: 3
MODELING OF SIO2 DEPOSITION IN HIGH-DENSITY PLASMA REACTORS AND COMPARISONS OF MODEL PREDICTIONS WITH EXPERIMENTAL MEASUREMENTS
Authors: MEEKS E LARSON RS HO P APBLETT C HAN SM EDELBERG E AYDIL ES
Citation: E. Meeks et al., MODELING OF SIO2 DEPOSITION IN HIGH-DENSITY PLASMA REACTORS AND COMPARISONS OF MODEL PREDICTIONS WITH EXPERIMENTAL MEASUREMENTS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 544-563
LUMINESCENCE FROM PLASMA-DEPOSITED SILICON FILMS
Authors: EDELBERG E BERGH S NAONE R HALL M AYDIL ES
Citation: E. Edelberg et al., LUMINESCENCE FROM PLASMA-DEPOSITED SILICON FILMS, Journal of applied physics, 81(5), 1997, pp. 2410-2417
VISIBLE LUMINESCENCE FROM NANOCRYSTALLINE SILICON FILMS PRODUCED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION
Authors: EDELBERG E BERGH S NAONE R HALL M AYDIL ES
Citation: E. Edelberg et al., VISIBLE LUMINESCENCE FROM NANOCRYSTALLINE SILICON FILMS PRODUCED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION, Applied physics letters, 68(10), 1996, pp. 1415-1417
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