Citation: Jd. Stuber et al., DESIGN AND MODELING OF RAPID THERMAL-PROCESSING SYSTEMS, IEEE transactions on semiconductor manufacturing, 11(3), 1998, pp. 442-457
Citation: J. Lee et al., EFFECTS OF DIAGONAL INPUT UNCERTAINTIES AND ELEMENT UNCERTAINTIES IN ILL-CONDITIONED PROCESSES, Industrial & engineering chemistry research, 37(3), 1998, pp. 1009-1017
Citation: J. Lee et al., ITERATIVE IDENTIFICATION METHODS FOR ILL-CONDITIONED PROCESSES, Industrial & engineering chemistry research, 37(3), 1998, pp. 1018-1023
Citation: Jt. Lee et al., MULTILOOP PI CONTROLLER TUNING FOR INTERACTING MULTIVARIABLE PROCESSES, Computers & chemical engineering, 22(11), 1998, pp. 1711-1723
Citation: C. Ling et Tf. Edgar, REAL-TIME CONTROL OF A WATER-GAS SHIFT REACTOR BY A MODEL-BASED FUZZYGAIN SCHEDULING TECHNIQUE, Journal of process control, 7(4), 1997, pp. 239-253
Citation: J. Lee et al., CONTROL-SYSTEM DESIGN BASED ON A NONLINEAR FIRST-ORDER PLUS TIME-DELAY MODEL, Journal of process control, 7(1), 1997, pp. 65-73
Citation: Iw. Kim et al., ROBUST DATA RECONCILIATION AND GROSS ERROR-DETECTION - THE MODIFIED MIMT USING NLP, Computers & chemical engineering, 21(7), 1997, pp. 775-782
Citation: S. Bushman et al., MODELING OF PLASMA ETCH SYSTEMS USING ORDINARY LEAST-SQUARES, RECURRENT NEURAL-NETWORK, AND PROJECTION TO LATENT STRUCTURE MODELS, Journal of the Electrochemical Society, 144(4), 1997, pp. 1379-1389
Citation: Rh. Dunia et al., EFFECT OF PROCESS UNCERTAINTIES ON GENERIC MODEL CONTROL - A GEOMETRIC APPROACH, Chemical Engineering Science, 52(14), 1997, pp. 2205-2222
Citation: Iw. Kim et al., DATA RECONCILIATION FOR INPUT-OUTPUT MODELS IN LINEAR DYNAMIC-SYSTEMS, The Korean journal of chemical engineering, 13(2), 1996, pp. 211-215
Citation: R. Dunia et al., USE OF PRINCIPAL COMPONENT ANALYSIS FOR SENSOR FAULT IDENTIFICATION, Computers & chemical engineering, 20, 1996, pp. 713-718
Citation: R. Dunia et Tf. Edgar, AN IMPROVED GENERIC MODEL CONTROL ALGORITHM FOR LINEAR-SYSTEMS, Computers & chemical engineering, 20(8), 1996, pp. 1003-1016
Authors:
HUANG YL
EDGAR TF
HIMMELBLAU DM
TRACHTENBERG I
Citation: Yl. Huang et al., CONSTRUCTING A RELIABLE NEURAL-NETWORK MODEL FOR A PLASMA-ETCHING PROCESS USING LIMITED EXPERIMENTAL-DATA, IEEE transactions on semiconductor manufacturing, 7(3), 1994, pp. 333-344
Citation: Gt. Wright et Tf. Edgar, NONLINEAR MODEL-PREDICTIVE CONTROL OF A FIXED-BED WATER-GAS SHIFT REACTOR - AN EXPERIMENTAL-STUDY, Computers & chemical engineering, 18(2), 1994, pp. 83-102
Citation: Aj. Toprac et al., A PREDICTIVE MODEL FOR THE CHEMICAL-VAPOR-DEPOSITION OF POLYSILICON IN A COLD-WALL, RAPID THERMAL SYSTEM, Journal of the Electrochemical Society, 141(6), 1994, pp. 1658-1663
Citation: Ta. Badgwell et al., MODELING THE WAFER TEMPERATURE PROFILE IN A MULTIWAFER LPCVD FURNACE, Journal of the Electrochemical Society, 141(1), 1994, pp. 161-172
Citation: Aa. Patwardhan et Tf. Edgar, NONLINEAR MODEL-PREDICTIVE CONTROL OF A PACKED DISTILLATION COLUMN, Industrial & engineering chemistry research, 32(10), 1993, pp. 2345-2356
Citation: Aj. Toprac et al., MODELING OF GAS-PHASE CHEMISTRY IN THE CHEMICAL-VAPOR-DEPOSITION OF POLYSILICON IN A COLD-WALL SYSTEM, Journal of the Electrochemical Society, 140(6), 1993, pp. 1809-1813