Authors: BURKE A BRAECKELMANN G MANGER D EISENBRAUN E KALOYEROS AE MCVITTIE JP HAN J BANG D LOAN JF SULLIVAN JJ

Citation: A. Burke et al., PROFILE SIMULATION OF CONFORMALITY OF CHEMICAL-VAPOR-DEPOSITED COPPERIN SUBQUARTER-MICRON TRENCH AND VIA STRUCTURES, Journal of applied physics, 82(9), 1997, pp. 4651-4660