Citation: Ma. Elkhakani et al., IRIDIUM THIN-FILMS DEPOSITED BY RADIOFREQUENCY MAGNETRON SPUTTERING, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(2), 1998, pp. 885-888
Authors:
BARBIER G
ROSS GG
ELKHAKANI MA
CHEVARIER N
CHEVARIER A
Citation: G. Barbier et al., EFFECTS OF LITHIUM-IMPLANTATION ON THE HYDROGEN RETENTION IN BOTH A-C-H AND A-SIC-H MATERIALS SUBMITTED TO DEUTERIUM BOMBARDMENT, Journal of nuclear materials, 241, 1997, pp. 1036-1040
Citation: Ma. Elkhakani et al., LINEAR-DEPENDENCE OF BOTH THE HARDNESS AND THE ELASTIC-MODULUS OF PULSED-LASER DEPOSITED A-SIC FILMS UPON THEIR SI-C BOND DENSITY, Journal of applied physics, 82(9), 1997, pp. 4310-4318
Citation: Ma. Elkhakani et al., COMPOSITION AND THERMAL-ANNEALING-INDUCED SHORT-RANGE ORDERING CHANGES IN AMORPHOUS HYDROGENATED SILICON-CARBIDE FILMS AS INVESTIGATED BY EXTENDED X-RAY-ABSORPTION FINE-STRUCTURE AND INFRARED-ABSORPTION, Physical review. B, Condensed matter, 51(8), 1995, pp. 4903-4914
Authors:
BOUNASRI F
MOISAN M
STONGE L
MARGOT J
CHAKER M
PELLETIER J
ELKHAKANI MA
GAT E
Citation: F. Bounasri et al., ETCHING CHARACTERISTICS OF THIN-FILMS OF TUNGSTEN, AMORPHOUS-SILICON CARBIDE, AND SAL-603 RESIST SUBMITTED TO A SURFACE-WAVE DRIVEN SF6 MAGNETOPLASMA NEAR ELECTRON-CYCLOTRON-RESONANCE CONDITIONS, Journal of applied physics, 77(8), 1995, pp. 4030-4038
Authors:
ELKHAKANI MA
CHAKER M
JEAN A
BOILY S
KIEFFER JC
OHERN ME
RAVET MF
ROUSSEAUX F
Citation: Ma. Elkhakani et al., HARDNESS AND YOUNGS MODULUS OF AMORPHOUS A-SIC THIN-FILMS DETERMINED BY NANOINDENTATION AND BULGE TESTS, Journal of materials research, 9(1), 1994, pp. 96-103
Citation: Ma. Elkhakani et M. Chaker, PHYSICAL-PROPERTIES OF THE X-RAY MEMBRANE MATERIALS, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2930-2937
Authors:
TOSELLO C
FERRARI F
BRAND R
KEUNE W
MAREST G
ELKHAKANI MA
PARELLADA J
PRINCIPI G
LORUSSO S
RIGATO V
ENZO S
Citation: C. Tosello et al., MIXING EFFECT OF FE NI MULTILAYERS OF OVERALL FE65NI35 COMPOSITION/, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 80-1, 1993, pp. 417-420
Authors:
ELKHAKANI MA
CHAKER M
JEAN A
BOILY S
PEPIN H
KIEFFER JC
GUJRATHI SC
Citation: Ma. Elkhakani et al., EFFECT OF RAPID THERMAL ANNEALING ON BOTH THE STRESS AND THE BONDING STATES OF A-SIC-H FILMS, Journal of applied physics, 74(4), 1993, pp. 2834-2840
Authors:
JEAN A
ELKHAKANI MA
CHAKER M
GAT E
DODIER J
PAPADOPOULLOS A
LAFONTAINE H
PEPIN H
KIEFFER JC
RAVET MF
MADOURI A
BOURNEIX J
ROUSSEAUX F
GUJRATHI SC
Citation: A. Jean et al., MECHANICAL-PROPERTIES OF SILICON-CARBIDE FILMS FOR X-RAY-LITHOGRAPHY APPLICATION, Canadian journal of physics, 70(10-11), 1992, pp. 834-837