Authors: BOYD JM ELLUL JP

Citation: Jm. Boyd et Jp. Ellul, A ONE-STEP SHALLOW TRENCH GLOBAL PLANARIZATION PROCESS USING CHEMICAL-MECHANICAL POLISHING, Journal of the Electrochemical Society, 144(5), 1997, pp. 1838-1841

Authors: BOYD JM ELLUL JP

Citation: Jm. Boyd et Jp. Ellul, NEAR-GLOBAL PLANARIZATION OF OXIDE-FILLED SHALLOW TRENCHES USING CHEMICAL-MECHANICAL POLISHING, Journal of the Electrochemical Society, 143(11), 1996, pp. 3718-3721