Authors:
ELSHERBINY MA
KHANH NQ
WORMEESTER H
FRIED M
LOHNER T
PINTER I
GYULAI J
Citation: Ma. Elsherbiny et al., SURFACE DISORDER PRODUCTION DURING PLASMA IMMERSION IMPLANTATION AND HIGH-ENERGY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 728-732
Authors:
KHANH NQ
PINTER I
DUCSO C
ADAM M
SZILAGYI E
BARSONY I
ELSHERBINY MA
GYULAI J
Citation: Nq. Khanh et al., ION-BEAM ANALYSIS OF PLASMA IMMERSION IMPLANTED SILICON FOR SOLAR-CELL FABRICATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 259-262