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Authors: ELSHERBINY MA KHANH NQ WORMEESTER H FRIED M LOHNER T PINTER I GYULAI J
Citation: Ma. Elsherbiny et al., SURFACE DISORDER PRODUCTION DURING PLASMA IMMERSION IMPLANTATION AND HIGH-ENERGY ION-IMPLANTATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 118(1-4), 1996, pp. 728-732

Authors: KHANH NQ PINTER I DUCSO C ADAM M SZILAGYI E BARSONY I ELSHERBINY MA GYULAI J
Citation: Nq. Khanh et al., ION-BEAM ANALYSIS OF PLASMA IMMERSION IMPLANTED SILICON FOR SOLAR-CELL FABRICATION, Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms, 112(1-4), 1996, pp. 259-262
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