Authors: WAGNER FX SCAGGS M KOCH A ENDERT H CHRISTEN HM KNAUSS LA HARSHAVARDHAN KS GREEN SM

Citation: Fx. Wagner et al., EPITAXIAL HTS THIN-FILMS GROWN BY PLD WITH A BEAM HOMOGENIZER, Applied surface science, 129, 1998, pp. 477-480

Authors: ENDERT H PATZEL R REBHAN U POWELL M BASTING D

Citation: H. Endert et al., NEW KRF AND ARF EXCIMER LASERS FOR ADVANCED DEEP-ULTRAVIOLET OPTICAL LITHOGRAPHY, JPN J A P 1, 34(8A), 1995, pp. 4050-4054

Authors: ENDERT H PATZEL R BASTING D

Citation: H. Endert et al., EXCIMER-LASER - A NEW TOOL FOR PRECISION MICROMACHINING, Optical and quantum electronics, 27(12), 1995, pp. 1319-1335

Authors: ENDERT H PATZEL R POWELL M REBHAN U BASTING D

Citation: H. Endert et al., NEW KRF AND ARF EXCIMER-LASER FOR ADVANCED DUV LITHOGRAPHY, Microelectronic engineering, 27(1-4), 1995, pp. 221-224

Authors: REBHAN U ENDERT H ZAAL G

Citation: U. Rebhan et al., MICROMANUFACTURING BENEFITS FROM EXCIMER-LASER DEVELOPMENT, Laser focus, 30(11), 1994, pp. 91