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Results: 1-16 |
Results: 16
THERMAL-CHARACTERISTICS OF AN X-RAY MASK DURING PATTERN TRANSFER
Authors: RESNICK DJ PENDHARKAR SV DAUKSHER WJ CUMMINGS KD LAUDON MF ROMANOWICZ B RENAUD P ENGELSTAD RL
Citation: Dj. Resnick et al., THERMAL-CHARACTERISTICS OF AN X-RAY MASK DURING PATTERN TRANSFER, Microelectronic engineering, 42, 1998, pp. 287-290
MECHANICAL MODELING OF PROJECTION ELECTRON-BEAM LITHOGRAPHY MASKS
Authors: DICKS GA ENGELSTAD RL LOVELL EG LIDDLE JA
Citation: Ga. Dicks et al., MECHANICAL MODELING OF PROJECTION ELECTRON-BEAM LITHOGRAPHY MASKS, JPN J A P 1, 36(12B), 1997, pp. 7564-7569
PATTERN PLACEMENT ERRORS IN MASK MEMBRANES
Authors: FISHER AH LAUDON MF ENGELSTAD RL LOVELL EG CERRINA F
Citation: Ah. Fisher et al., PATTERN PLACEMENT ERRORS IN MASK MEMBRANES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 15(6), 1997, pp. 2249-2254
VIBRATORY ANALYSIS OF AN X-RAY MASK MEMBRANE DURING STEPPING
Authors: LAIRD DL ENGELSTAD RL
Citation: Dl. Laird et Rl. Engelstad, VIBRATORY ANALYSIS OF AN X-RAY MASK MEMBRANE DURING STEPPING, Microelectronic engineering, 35(1-4), 1997, pp. 531-534
PREDICTING INPLANE DISTORTION FROM ELECTRON-BEAM LITHOGRAPHY ON X-RAYMASK MEMBRANES
Authors: LAIRD DL ENGELSTAD RL PUISTO DM ACOSTA RE CUMMINGS KD JOHNSON WA
Citation: Dl. Laird et al., PREDICTING INPLANE DISTORTION FROM ELECTRON-BEAM LITHOGRAPHY ON X-RAYMASK MEMBRANES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 4308-4313
MECHANICAL DESIGN ASPECTS OF THE LIBRA-SP LIGHT-ION BEAM DRIVEN ICF POWER-REACTOR
Authors: SVIATOSLAVSKY IN MOGAHED EA COUSSEAU PL ENGELSTAD RL KHATER HY KULCINSKI GL MACFARLANE JJ PETERSON RR SAWAN ME WANG P
Citation: In. Sviatoslavsky et al., MECHANICAL DESIGN ASPECTS OF THE LIBRA-SP LIGHT-ION BEAM DRIVEN ICF POWER-REACTOR, Fusion technology, 30(3), 1996, pp. 1299-1303
LIBRA-SP, A COMMERCIAL FUSION-REACTOR BASED ON NEAR-TERM TECHNOLOGY
Authors: KULCINSKI GL COUSSEAU P ENGELSTAD RL KHATER HY MACFARLANE JJ MOGAHED EA PETERSON RR SAWAN ME SVIATOSLAVSKY IN WANG P
Citation: Gl. Kulcinski et al., LIBRA-SP, A COMMERCIAL FUSION-REACTOR BASED ON NEAR-TERM TECHNOLOGY, Fusion technology, 30(3), 1996, pp. 1641-1645
THERMAL-ANALYSIS OF AN X-RAY MASK MEMBRANE IN A PLASMA ENVIRONMENT
Authors: LAUDON MF THOLE KA ENGELSTAD RL RESNICK DJ CUMMINGS KD DAUKSHER WJ
Citation: Mf. Laudon et al., THERMAL-ANALYSIS OF AN X-RAY MASK MEMBRANE IN A PLASMA ENVIRONMENT, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3050-3054
RADIATION DAMAGE-INDUCED CHANGES IN SILICON-NITRIDE MEMBRANE MECHANICAL-PROPERTIES
Authors: WELLS GM CHEN HTH WALLACE JP ENGELSTAD RL CERRINA F
Citation: Gm. Wells et al., RADIATION DAMAGE-INDUCED CHANGES IN SILICON-NITRIDE MEMBRANE MECHANICAL-PROPERTIES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 13(6), 1995, pp. 3075-3077
NOVEL TECHNIQUE FOR THE SEPARATION OF MECHANICAL-PROPERTIES AND INTRINSIC STRESS OF PRE-IRRADIATED AND POST-IRRADIATED MEMBRANES
Authors: CHEN HTH ENGELSTAD RL CERRINA F
Citation: Hth. Chen et al., NOVEL TECHNIQUE FOR THE SEPARATION OF MECHANICAL-PROPERTIES AND INTRINSIC STRESS OF PRE-IRRADIATED AND POST-IRRADIATED MEMBRANES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 3975-3978
TEMPERATURE UNIFORMITY ACROSS AN X-RAY MASK MEMBRANE DURING RESIST BAKING
Authors: RESNICK DJ CUMMINGS KD JOHNSON WA CHEN HTH CHOI B ENGELSTAD RL
Citation: Dj. Resnick et al., TEMPERATURE UNIFORMITY ACROSS AN X-RAY MASK MEMBRANE DURING RESIST BAKING, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 12(6), 1994, pp. 4033-4037
EVOLUTION OF LIGHT-ION DRIVEN FUSION POWER-PLANTS LEADING TO THE LIBRA-SP DESIGN
Authors: KULCINSKI GL PETERSON RR MOSES GA BRUGGINK D COUSSEAU P ENGELSTAD RL LEE YM KHATER HY LOVELL EG MACFARLANE JJ MOGAHED EA RUTLEDGE S SAWAN ME SVIATOSLAVSKY IN WANG P WITTENBERG LJ
Citation: Gl. Kulcinski et al., EVOLUTION OF LIGHT-ION DRIVEN FUSION POWER-PLANTS LEADING TO THE LIBRA-SP DESIGN, Fusion technology, 26(3), 1994, pp. 849-856
A NEAR SYMMETRICALLY ILLUMINATED DIRECT-DRIVE LASER FUSION POWER-REACTOR - SIRIUS-P
Authors: SVIATOSLAVSKY IN KULCINSKI GL MOSES GA BRUGGINK D ENGELSTAD RL KHATER HY LARSEN EM LOVELL EG MACFARLANE JJ MOGAHED EA PETERSON RR SAWAN ME WANG P WITTENBERG LJ
Citation: In. Sviatoslavsky et al., A NEAR SYMMETRICALLY ILLUMINATED DIRECT-DRIVE LASER FUSION POWER-REACTOR - SIRIUS-P, Fusion technology, 26(3), 1994, pp. 868-872
MECHANICAL RESPONSE OF X-RAY MASKS
Authors: LAUDON MF LAIRD DL ENGELSTAD RL CERRINA F
Citation: Mf. Laudon et al., MECHANICAL RESPONSE OF X-RAY MASKS, JPN J A P 1, 32(12B), 1993, pp. 5928-5932
PRACTICAL CONSIDERATIONS IN X-RAY MASK MOUNTING METHODOLOGY
Authors: LAIRD DL LAUDON MF ENGELSTAD RL
Citation: Dl. Laird et al., PRACTICAL CONSIDERATIONS IN X-RAY MASK MOUNTING METHODOLOGY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2953-2957
INTENSE LIGHT-ION BEAMS PROVIDE A ROBUST, COMMON-DRIVER PATH TOWARD IGNITION, GAIN, AND COMMERCIAL FUSION ENERGY
Authors: RAMIREZ JJ COOK DL RICE JK MATZEN MK JOHNSON DL BOYES JD OLSON CL PRESTWICH KR CLAUSER MJ MEHLHORN TA STINNETT RW ALLSHOUSE GO KULCINSKI GL MOSES GA PETERSON RR ENGELSTAD RL
Citation: Jj. Ramirez et al., INTENSE LIGHT-ION BEAMS PROVIDE A ROBUST, COMMON-DRIVER PATH TOWARD IGNITION, GAIN, AND COMMERCIAL FUSION ENERGY, Laser and particle beams, 11(2), 1993, pp. 423-430
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