Authors: ENGQVIST J JANSSON U

Citation: J. Engqvist et U. Jansson, INITIAL-STAGES OF GROWTH DURING CVD OF W ON TISI2 SUBSTRATES, Thin solid films, 263(1), 1995, pp. 54-64

Authors: ENGQVIST J JANSSON U LU J CARLSSON JO

Citation: J. Engqvist et al., C49 C54 PHASE-TRANSFORMATION DURING CHEMICAL-VAPOR-DEPOSITION OF TISI2/, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(1), 1994, pp. 161-168