Authors: RICHTER C ESPERTSHUBER K WAGNER C EICKHOFF M KROTZ G

Citation: C. Richter et al., RAPID PLASMA-ETCHING OF CUBIC SIC USING NF3 O-2 GAS-MIXTURES/, Materials science & engineering. B, Solid-state materials for advanced technology, 46(1-3), 1997, pp. 160-163