Login
|
New Account
AAAAAA
ITA
ENG
Results:
1-1
|
Results: 1
Ultrathin silicon oxynitride film formation by plasma immersion nitrogen implantation
Authors:
Baumvol, IJR Krug, C Stedile, FC Green, ML Jacobson, DC Eaglesham, D Bernstein, JD Shao, J Denholm, AS Kellerman, PL
Citation:
Ijr. Baumvol et al., Ultrathin silicon oxynitride film formation by plasma immersion nitrogen implantation, APPL PHYS L, 74(6), 1999, pp. 806-808
Risultati:
1-1
|