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Results: 2
Integration of reactive process modeling into semiconductor technology development
Authors:
Egan, EW
Citation:
Ew. Egan, Integration of reactive process modeling into semiconductor technology development, MAT SC S PR, 3(1-2), 2000, pp. 13-22
Monte Carlo simulations of sputter deposition and step coverage of thin films
Authors:
Coronell, DG Egan, EW Hamilton, G Jain, A Venkatraman, R Weitzman, B
Citation:
Dg. Coronell et al., Monte Carlo simulations of sputter deposition and step coverage of thin films, THIN SOL FI, 333(1-2), 1998, pp. 77-81
Risultati:
1-2
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