Authors: Selen, LJM Janssen, FJJ van IJzendoorn, LJ de Voigt, MJA Theunissen, MJJ Smulders, PJM Eijkemans, TJ

Citation: Ljm. Selen et al., Ion-channeling analysis of boron clusters in silicon, J APPL PHYS, 90(9), 2001, pp. 4741-4747