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Results: 3
The first metal complex containing a silylated beta-diketonate ligand: bis(2,2,6,6-tetramethyl-2-sila-3,5-heptanedionato) copper(II)
Authors: Banger, KK Kornilov, A Claessen, RU Eisenbraun, ET Kaloyeros, AE Toscano, PJ Welch, JT
Citation: Kk. Banger et al., The first metal complex containing a silylated beta-diketonate ligand: bis(2,2,6,6-tetramethyl-2-sila-3,5-heptanedionato) copper(II), INORG CH C, 4(9), 2001, pp. 496-500
Low temperature metalorganic chemical vapor deposition of conformal silvercoatings for applications in high aspect ratio structures
Authors: Eisenbraun, ET Klaver, A Patel, Z Nuesca, G Kaloyeros, AE
Citation: Et. Eisenbraun et al., Low temperature metalorganic chemical vapor deposition of conformal silvercoatings for applications in high aspect ratio structures, J VAC SCI B, 19(2), 2001, pp. 585-588
Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications
Authors: Vydianathan, K Nuesca, G Peterson, G Eisenbraun, ET Kaloyeros, AE Sullivan, JJ Han, B
Citation: K. Vydianathan et al., Metalorganic chemical vapor deposition of titanium oxide for microelectronics applications, J MATER RES, 16(6), 2001, pp. 1838-1849
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