Authors:
Nelson, CE
Elam, JW
Tolbert, MA
George, SM
Citation: Ce. Nelson et al., H2O and HCl adsorption on single crystal alpha-Al2O3(0001) at stratospheric temperatures, APPL SURF S, 171(1-2), 2001, pp. 21-33
Authors:
Elam, JW
Nelson, CE
Grubbs, RK
George, SM
Citation: Jw. Elam et al., Kinetics of the WF6 and Si2H6 surface reactions during tungsten atomic layer deposition, SURF SCI, 479(1-3), 2001, pp. 121-135