Authors: Sun, YM Lee, SY Lemonds, AM Engbrecht, ER Veldman, S Lozano, J White, JM Ekerdt, JG Emesh, I Pfeifer, K

Citation: Ym. Sun et al., Low temperature chemical vapor deposition of tungsten carbide for copper diffusion barriers, THIN SOL FI, 397(1-2), 2001, pp. 109-115