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Results: 1-5 |
Results: 5

Authors: Endle, JP Sun, YM Nguyen, N Madhukar, S Hance, RL White, JM Ekerdt, JG
Citation: Jp. Endle et al., Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films, THIN SOL FI, 388(1-2), 2001, pp. 126-133

Authors: Endle, JP Sun, YM Silverman, J Nguyen, N Cowley, AH White, JM Ekerdt, JG
Citation: Jp. Endle et al., Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors, THIN SOL FI, 385(1-2), 2001, pp. 66-73

Authors: Sun, YM Yan, XM Mettlach, N Endle, JP Kirsch, PD Ekerdt, JG Madhukar, S Hance, RL White, JM
Citation: Ym. Sun et al., Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium, J VAC SCI A, 18(1), 2000, pp. 10-16

Authors: Sun, YM Endle, JP Ekerdt, JG Russell, NM Healy, MD White, JM
Citation: Ym. Sun et al., Aluminum titanium nitride films grown with multiple precursors, MAT SC S PR, 2(3), 1999, pp. 253-261

Authors: Sun, YM Endle, JP Smith, K Whaley, S Mahaffy, R Ekerdt, JG White, JM Hance, RL
Citation: Ym. Sun et al., Iridium film growth with iridium tris-acetylacetonate: oxygen and substrate effects, THIN SOL FI, 346(1-2), 1999, pp. 100-107
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