Authors:
Endle, JP
Sun, YM
Nguyen, N
Madhukar, S
Hance, RL
White, JM
Ekerdt, JG
Citation: Jp. Endle et al., Iridium precursor pyrolysis and oxidation reactions and direct liquid injection chemical vapor deposition of iridium films, THIN SOL FI, 388(1-2), 2001, pp. 126-133
Authors:
Endle, JP
Sun, YM
Silverman, J
Nguyen, N
Cowley, AH
White, JM
Ekerdt, JG
Citation: Jp. Endle et al., Titanium-aluminum nitride film growth and related chemistry using dimethylamino-based precursors, THIN SOL FI, 385(1-2), 2001, pp. 66-73
Authors:
Sun, YM
Yan, XM
Mettlach, N
Endle, JP
Kirsch, PD
Ekerdt, JG
Madhukar, S
Hance, RL
White, JM
Citation: Ym. Sun et al., Precursor chemistry and film growth with (methylcyclopentadienyl) (1,5-cyclooctadiene)iridium, J VAC SCI A, 18(1), 2000, pp. 10-16
Authors:
Sun, YM
Endle, JP
Smith, K
Whaley, S
Mahaffy, R
Ekerdt, JG
White, JM
Hance, RL
Citation: Ym. Sun et al., Iridium film growth with iridium tris-acetylacetonate: oxygen and substrate effects, THIN SOL FI, 346(1-2), 1999, pp. 100-107