Authors:
Fuchs, H
Engers, B
Hettkamp, E
Mecke, H
Schultz, J
Citation: H. Fuchs et al., Deposition rate and thickness uniformity of thin films deposited by a pulsed cathodic arc process, SURF COAT, 142, 2001, pp. 655-660
Authors:
Engers, B
Fuchs, H
Schultz, J
Hettkamp, E
Mecke, K
Citation: B. Engers et al., Comparison of substrate temperature and deposition rate between modified pulsed arc process and d.c. arc process, SURF COAT, 133, 2000, pp. 121-125