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Results: 1-3 |
Results: 3

Authors: Fuchs, H Engers, B Hettkamp, E Mecke, H Schultz, J
Citation: H. Fuchs et al., Deposition rate and thickness uniformity of thin films deposited by a pulsed cathodic arc process, SURF COAT, 142, 2001, pp. 655-660

Authors: Engers, B Fuchs, H Schultz, J Hettkamp, E Mecke, K
Citation: B. Engers et al., Comparison of substrate temperature and deposition rate between modified pulsed arc process and d.c. arc process, SURF COAT, 133, 2000, pp. 121-125

Authors: Engers, B Bauer, HU
Citation: B. Engers et Hu. Bauer, Cost-effective PVD coatings in batch systems, SURF COAT, 119, 1999, pp. 705-710
Risultati: 1-3 |