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Citation: Ws. Yoo et al., Design of single-wafer furnace and its rapid thermal processing applications, JPN J A P 1, 39(11), 2000, pp. 6143-6151

Authors: Yoo, WS Fukada, T Kuribayashi, H Kitayama, H Takahashi, N Enjoji, K Sunohara, K

Citation: Ws. Yoo et al., Single wafer furnace and its thermal processing applications, JPN J A P 2, 39(7A), 2000, pp. L694-L697

Authors: Yoo, WS Fukada, T Kitayama, H Takahashi, N Enjoji, K Sunohara, K

Citation: Ws. Yoo et al., Slip-free rapid thermal processing in single wafer furnace, JPN J A P 2, 39(6A), 2000, pp. L493-L496

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