Authors: FALTERMEIER CG GOLDBERG C JONES M UPHAM A KNORR A IVANOVA A PETERSON G KALOYEROS AE ARKLES B

Citation: Cg. Faltermeier et al., THE EFFECTS OF PROCESSING PARAMETERS IN THE LOW-TEMPERATURE CHEMICAL-VAPOR-DEPOSITION OF TITANIUM NITRIDE FROM TETRAIODOTITANIUM, Journal of the Electrochemical Society, 145(2), 1998, pp. 676-683