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Citation: Ak. Raychaudhuri et al., INITIAL RESULTS FROM AN EXTREME-ULTRAVIOLET INTERFEROMETER OPERATING WITH A COMPACT LASER-PLASMA SOURCE, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 14(6), 1996, pp. 3964-3968

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Authors: PARTLO WN FIELDS CH OLDHAM WG

Citation: Wn. Partlo et al., DIRECT AERIAL IMAGE MEASUREMENT AS A METHOD OF TESTING HIGH NUMERICALAPERTURE MICROLITHOGRAPHIC LENSES, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2686-2691