Authors: KASUKABE Y TAKEDA S FIUJNO Y YAMADA Y NAGATA S KISHIMOTO M YAMAGUCHI S

Citation: Y. Kasukabe et al., EARLY NITRIDING STAGE OF EVAPORATED-TI THIN-FILMS BY N-ION IMPLANTATION, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(4), 1997, pp. 1848-1852