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Results: 3

Authors: FONT GI BOYD ID BALAKRISHNAN J
Citation: Gi. Font et al., EFFECTS OF WALL RECOMBINATION ON THE ETCH RATE AND PLASMA COMPOSITIONOF AN ETCH REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 16(4), 1998, pp. 2057-2064

Authors: GIFFIN GB HASTINGS DE FONT GI SHAW GB COOKE DL
Citation: Gb. Giffin et al., PARTICLE-IN-CELL CODE ANALYSIS OF CHARGING HAZARDS AND WAKE STUDIES EXPERIMENT, Journal of spacecraft and rockets, 35(3), 1998, pp. 395-402

Authors: FONT GI BOYD ID
Citation: Gi. Font et Id. Boyd, NUMERICAL STUDY OF THE EFFECTS OF REACTOR GEOMETRY ON A CHLORINE PLASMA HELICON ETCH REACTOR, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 15(2), 1997, pp. 313-319
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