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Citation: J. Etrillard et al., DRY-ETCHING OF INP IN HELICON HBR PLASMA - MORPHOLOGY AND CHARACTERIZATION OF SURFACE DAMAGE, Journal de physique. III, 5(5), 1995, pp. 467-481

Authors: ETRILLARD J FRANCOU JM INARD A HENRY D

Citation: J. Etrillard et al., ANISOTROPIC ETCHING OF SUBMICRONIC RESIST STRUCTURES BY RESONANT INDUCTIVE PLASMA-ETCHING, JPN J A P 1, 33(10), 1994, pp. 6005-6012

Authors: PETRI R HENRY D FRANCOU JM SADEGHI N VAYERBESANCON M

Citation: R. Petri et al., TUNGSTEN ETCHING IN LOW-PRESSURE SF6 PLASMA - INFLUENCE OF THE SURFACE-TEMPERATURE, Journal of applied physics, 75(2), 1994, pp. 1171-1178