Authors:
ADELERHOF DJ
BIJLSMA ME
FRANSEN PBM
WEIMAN T
FLOKSTRA J
ROGALLA H
Citation: Dj. Adelerhof et al., FABRICATION OF NB AL,ALOX/AL/NB JOSEPHSON TUNNEL-JUNCTIONS USING REACTIVE ION ETCHING IN SF6/, Physica. C, Superconductivity, 209(4), 1993, pp. 477-485