Authors: GOSCHNICK J FRIETSCH M SCHNEIDER T

Citation: J. Goschnick et al., NONUNIFORM SIO2 MEMBRANES PRODUCED BY ION-BEAM-ASSISTED CHEMICAL-VAPOR-DEPOSITION TO TUNE WO3 GAS SENSOR MICROARRAYS, Surface & coatings technology, 109(1-3), 1998, pp. 292-296