Authors: FRIJLINK PM COLLET A BELLAICHE J IOST M VERHEIJEN MJ VANHELLEPUTTE HRJR MOORS WGJ VANDELFT FCMJM

Citation: Pm. Frijlink et al., DEVELOPMENT OF A 100-NM GATE POWER HEMT USING 4-LAYER RESIST AND FLEXIBLE E-BEAM EXPOSURE STRATEGIES, Microelectronic engineering, 35(1-4), 1997, pp. 313-316