Authors:
FRIJLINK PM
COLLET A
BELLAICHE J
IOST M
VERHEIJEN MJ
VANHELLEPUTTE HRJR
MOORS WGJ
VANDELFT FCMJM
Citation: Pm. Frijlink et al., DEVELOPMENT OF A 100-NM GATE POWER HEMT USING 4-LAYER RESIST AND FLEXIBLE E-BEAM EXPOSURE STRATEGIES, Microelectronic engineering, 35(1-4), 1997, pp. 313-316