Authors: GAY TJ BRAND JA FRITTS MC FURST JE KHAKOO MA MELL ER SIEGER MT WIJAYARATNA WMKP

Citation: Tj. Gay et al., CLEAN ULTRAHIGH-VACUUM SYSTEM WITH SINGLE-STRUCTURE DIFFUSION PUMPS, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(5), 1994, pp. 2903-2910