Authors: LINDNER JKN VOLZ K PRECKWINKEL U GOTZ B FROHNWIESER A RAUSCHENBACH B STRITZKER B

Citation: Jkn. Lindner et al., FORMATION OF BURIED EPITAXIAL SILICON-CARBIDE LAYERS IN SILICON BY ION-BEAM SYNTHESIS, Materials chemistry and physics, 46(2-3), 1996, pp. 147-155