Authors: BIJKERK F SHMAENOK L VANHONK A BASTIAENSEN R PLATONOV YY SHEVELKO AP MITROFANOV AV VOSS F DESOR R FROWEIN H NIKOLAUS B

Citation: F. Bijkerk et al., LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Journal de physique. III, 4(9), 1994, pp. 1669-1677

Authors: SHMAENOK L BIJKERK F LOUIS E VANHONK A VANDERWIEL MJ PLATONOV Y SHEVELKO A MITROFANOV A FROWEIN H NICOLAUS B VOSS F DESOR R

Citation: L. Shmaenok et al., ISSUES OF LASER-PLASMA SOURCES FOR SOFT-X-RAY PROJECTION LITHOGRAPHY, Microelectronic engineering, 23(1-4), 1994, pp. 211-214