Results: 1-3 |
Results: 3
ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR 256M DYNAMIC RANDOM-ACCESS MEMORY LITHOGRAPHY
Authors: SAKAMOTO K FUEKI S YAMAZAKI S ABE T KOBAYASHI K NISHINO H SATOH T TAKEMOTO A OOKURA A OHNO M SAGOH S OAE Y YAMADA A KAI J YASUDA H
Citation: K. Sakamoto et al., ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR 256M DYNAMIC RANDOM-ACCESS MEMORY LITHOGRAPHY, JPN J A P 1, 32(12B), 1993, pp. 6006-6011
ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR A 256-M DYNAMIC RANDOM-ACCESSMEMORY
Authors: SAKAMOTO K FUEKI S YAMAZAKI S ABE T KOBAYASHI K NISHINO H SATOH T TAKEMOTO A OOKURA A OONO M SAGO S OAE Y YAMADA A YASUDA H
Citation: K. Sakamoto et al., ELECTRON-BEAM BLOCK EXPOSURE SYSTEM FOR A 256-M DYNAMIC RANDOM-ACCESSMEMORY, Journal of vacuum science & technology. B, Microelectronics and nanometer structures processing, measurement and phenomena, 11(6), 1993, pp. 2357-2361
GENERALIZED TOUCH AND CROSS ROUTER
Authors: KAWAMURA K FUEKI S MIWATARI H
Citation: K. Kawamura et al., GENERALIZED TOUCH AND CROSS ROUTER, Fujitsu Scientific and Technical Journal, 31(2), 1995, pp. 208-214
Risultati: 1-3 |