Authors:
MIENO F
TUKUNE A
MIYATA H
SHIMIZU A
FURUMURA Y
Citation: F. Mieno et al., SPONTANEOUS POLYSILICON AND EPITAXIAL SILICON DEPOSITION, Journal of the Electrochemical Society, 142(5), 1995, pp. 1590-1594
Authors:
OHBA T
SUZUKI T
YAGI H
FURUMURA Y
HATANO T
Citation: T. Ohba et al., DECOMPOSITION PROPERTY OF METHYLHYDRAZINE WITH TITANIUM NITRIDATION AT LOW-TEMPERATURE, Journal of the Electrochemical Society, 142(3), 1995, pp. 934-938
Authors:
YOSHIKAWA K
KIMURA T
NOSHIRO H
OTANI S
YAMADA M
FURUMURA Y
Citation: K. Yoshikawa et al., RUO2 THIN-FILMS AS BOTTOM ELECTRODES FOR HIGH DIELECTRIC-CONSTANT MATERIALS, JPN J A P 2, 33(6B), 1994, pp. 120000867-120000869