Authors:
Nefedov, A
Fanchenko, S
Sbitnev, S
Heyde, M
Rademann, K
Bartholomaus, L
Roth, U
Moritz, W
Citation: A. Nefedov et al., Direct observation of platinum etching during the fluorination of a Pt/LaF3/Si structure, PHYS ST S-A, 176(2), 1999, pp. 943-952