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Authors: Liaw, HM Doyle, R Fejes, PL Zollner, S Konkar, A Linthicum, KJ Gehrke, T Davis, RF

Citation: Hm. Liaw et al., Crystallinity and microstructures of aluminum nitride films deposited on Si(111) substrates, SOL ST ELEC, 44(4), 2000, pp. 747-755