Citation: Jw. Klaus et al., Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions, APPL SURF S, 162, 2000, pp. 479-491
Citation: Jw. Klaus et al., Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction, THIN SOL FI, 360(1-2), 2000, pp. 145-153
Citation: Jw. Klaus et al., Atomic layer deposition of tungsten nitride films using sequential surfacereactions, J ELCHEM SO, 147(3), 2000, pp. 1175-1181