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Results: 1-3 |
Results: 3
Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions
Authors: Klaus, JW Ferro, SJ George, SM
Citation: Jw. Klaus et al., Atomically controlled growth of tungsten and tungsten nitride using sequential surface reactions, APPL SURF S, 162, 2000, pp. 479-491
Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction
Authors: Klaus, JW Ferro, SJ George, SM
Citation: Jw. Klaus et al., Atomic layer deposition of tungsten using sequential surface chemistry with a sacrificial stripping reaction, THIN SOL FI, 360(1-2), 2000, pp. 145-153
Atomic layer deposition of tungsten nitride films using sequential surfacereactions
Authors: Klaus, JW Ferro, SJ George, SM
Citation: Jw. Klaus et al., Atomic layer deposition of tungsten nitride films using sequential surfacereactions, J ELCHEM SO, 147(3), 2000, pp. 1175-1181
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