Authors: Fitsilis, F Regnery, S Ehrhart, P Waser, R Schienle, F Schumacher, M Dauelsberg, M Strzyzewski, P Juergensen, H

Citation: F. Fitsilis et al., BST thin films grown in a multiwafer MOCVD reactor, J EUR CERAM, 21(10-11), 2001, pp. 1547-1551

Authors: Ehrhart, P Fitsilis, F Regnery, S Waser, R Schienle, F Schumacher, M Dauelsberg, M Strzyzewski, P Juergensen, H

Citation: P. Ehrhart et al., Deposition of thin BST films in a multi-wafer planetary reactor, INTEGR FERR, 30(1-4), 2000, pp. 183-192