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Results:
1-3
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Results: 3
Surface roughness development during photoresist dissolution
Authors:
Flanagin, LW Singh, VK Willson, CG
Citation:
Lw. Flanagin et al., Surface roughness development during photoresist dissolution, J VAC SCI B, 17(4), 1999, pp. 1371-1379
Molecular model of phenolic polymer dissolution in photolithography
Authors:
Flanagin, LW Singh, VK Willson, CG
Citation:
Lw. Flanagin et al., Molecular model of phenolic polymer dissolution in photolithography, J POL SC PP, 37(16), 1999, pp. 2103-2113
Mechanism of phenolic polymer dissolution: Importance of acid-base equilibria
Authors:
Flanagin, LW McAdams, CL Hinsberg, WD Sanchez, IC Willson, CG
Citation:
Lw. Flanagin et al., Mechanism of phenolic polymer dissolution: Importance of acid-base equilibria, MACROMOLEC, 32(16), 1999, pp. 5337-5343
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