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Authors: Peiner, E Mikuta, R Iwert, T Fritsch, H Hauptmann, P Fricke, K Schlachetzki, A

Citation: E. Peiner et al., Micromachined resonator for cavitation sensing, SENS ACTU-A, 76(1-3), 1999, pp. 266-272

Authors: Fricke, K Peiner, E Chahoud, M Schlachetzki, A

Citation: K. Fricke et al., Fractures properties of InP microcantilevers by hetero-micromachining, SENS ACTU-A, 76(1-3), 1999, pp. 395-402