Authors: Frickinger, J Bugler, J Zielonka, G Pfitzner, L Ryssel, H Hollemann, S Schneider, H

Citation: J. Frickinger et al., Reducing airborne molecular contamination by efficient purging of FOUPs for 300-mm wafers - The influence of materials properties, IEEE SEMIC, 13(4), 2000, pp. 427-433