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Results: 1-3 |
Results: 3
A NEW ALGORITHM FOR REAL-TIME THIN-FILM THICKNESS ESTIMATION GIVEN IN-SITU MULTIWAVELENGTH ELLIPSOMETRY USING AN EXTENDED KALMAN FILTER
Authors: GALARZA CG KHARGONEKAR PP LAYADI N VINCENT TL RIETMAN EA LEE JTC
Citation: Cg. Galarza et al., A NEW ALGORITHM FOR REAL-TIME THIN-FILM THICKNESS ESTIMATION GIVEN IN-SITU MULTIWAVELENGTH ELLIPSOMETRY USING AN EXTENDED KALMAN FILTER, Thin solid films, 313, 1998, pp. 156-160
ROBUST APPROXIMATION AND CONTROL
Authors: GALARZA CG PENA RSS
Citation: Cg. Galarza et Rss. Pena, ROBUST APPROXIMATION AND CONTROL, Control systems magazine, 17(1), 1997, pp. 80-87
L(1) IDENTIFICATION APPLIED TO A FLUID-DYNAMICS PROBLEM
Authors: PARRILO PA PENA RSS GALARZA CG
Citation: Pa. Parrilo et al., L(1) IDENTIFICATION APPLIED TO A FLUID-DYNAMICS PROBLEM, IEEE transactions on control systems technology, 4(3), 1996, pp. 298-303
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