Authors: JAHN PW PETRAT FM WOLANY D DEIMEL M GANTENFORT T SCHMERLING C WENSING H WIEDMANN L BENNINGHOVEN A

Citation: Pw. Jahn et al., COMBINED INSTRUMENT FOR THE ONLINE INVESTIGATION OF PLASMA-DEPOSITED OR ETCHED SURFACES BY MONOCHROMATIZED X-RAY PHOTOELECTRON-SPECTROSCOPYAND TIME-OF-FLIGHT SECONDARY-ION MASS-SPECTROMETRY, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 12(3), 1994, pp. 671-676