Authors:
CRISTOLOVEANU S
IONESCU A
WETTEROTH T
SHIN H
MUNTEANU D
GENTIL P
HONG S
WILSON SR
Citation: S. Cristoloveanu et al., INFLUENCE OF NITROGEN OR ARGON ANNEALS ON THE PROPERTIES OF WAFERS AND DEVICES SEPARATED BY IMPLANTATION OF OXYGEN, Journal of the Electrochemical Society, 144(4), 1997, pp. 1468-1473