Authors:
KROLL U
MEIER J
KEPPNER H
SHAH A
LITTLEWOOD SD
KELLY IE
GIANNOULES P
Citation: U. Kroll et al., ORIGINS OF ATMOSPHERIC CONTAMINATION IN AMORPHOUS-SILICON PREPARED BYVERY HIGH-FREQUENCY (70 MHZ) GLOW-DISCHARGE, Journal of vacuum science & technology. A. Vacuum, surfaces, and films, 13(6), 1995, pp. 2742-2746